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The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate

Received: 29 August 2014     Accepted: 15 September 2014     Published: 30 September 2014
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Abstract

The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.

Published in International Journal of Materials Science and Applications (Volume 3, Issue 5)
DOI 10.11648/j.ijmsa.20140305.21
Page(s) 205-209
Creative Commons

This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.

Copyright

Copyright © The Author(s), 2014. Published by Science Publishing Group

Keywords

Transparent Conductive Oxide, ZnO, Mo, Sheet Resistance, Transmittance

References
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  • APA Style

    Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. (2014). The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. International Journal of Materials Science and Applications, 3(5), 205-209. https://doi.org/10.11648/j.ijmsa.20140305.21

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    ACS Style

    Tien-Chai Lin; Wen-Chang Huang; Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int. J. Mater. Sci. Appl. 2014, 3(5), 205-209. doi: 10.11648/j.ijmsa.20140305.21

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    AMA Style

    Tien-Chai Lin, Wen-Chang Huang, Fu-Chun Tsai. The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate. Int J Mater Sci Appl. 2014;3(5):205-209. doi: 10.11648/j.ijmsa.20140305.21

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  • @article{10.11648/j.ijmsa.20140305.21,
      author = {Tien-Chai Lin and Wen-Chang Huang and Fu-Chun Tsai},
      title = {The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate},
      journal = {International Journal of Materials Science and Applications},
      volume = {3},
      number = {5},
      pages = {205-209},
      doi = {10.11648/j.ijmsa.20140305.21},
      url = {https://doi.org/10.11648/j.ijmsa.20140305.21},
      eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmsa.20140305.21},
      abstract = {The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.},
     year = {2014}
    }
    

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  • TY  - JOUR
    T1  - The Electro-Optical Characteristics of the AZO/Mo/AZO Transparent Conductive Film on PC Substrate
    AU  - Tien-Chai Lin
    AU  - Wen-Chang Huang
    AU  - Fu-Chun Tsai
    Y1  - 2014/09/30
    PY  - 2014
    N1  - https://doi.org/10.11648/j.ijmsa.20140305.21
    DO  - 10.11648/j.ijmsa.20140305.21
    T2  - International Journal of Materials Science and Applications
    JF  - International Journal of Materials Science and Applications
    JO  - International Journal of Materials Science and Applications
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    EP  - 209
    PB  - Science Publishing Group
    SN  - 2327-2643
    UR  - https://doi.org/10.11648/j.ijmsa.20140305.21
    AB  - The triple-layered transparent conductive oxide thin films, AZO/Mo/AZO (OMO) structure, is present in the paper. The OMO film is deposited on polycarbonate (PC) substrates by a co-sputtering process at room temperature. Metal Mo is chosen because of its chemical stable and low resistivity. The OMO film shows a great reduction of resistivity through the addition of Mo layer. The dependence of the AZO thickness of the electro-optical characteristic to the OMO film is also discussed. A best figure of merit (FOM) of 1.56 × 10-5 -1 with a sheet resistance of 530 Ω/□ and average transmittance of 62% is found at the OMO film of 130 nm thickness. At this condition, the AZO film shows a low resistivity due to its excellent crystallinity.
    VL  - 3
    IS  - 5
    ER  - 

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Author Information
  • Department of Electrical Engineering, Kun Shan University, Tainan, Taiwan

  • Department of Electro-Optical Engineering, Kun Shan University, Tainan, Taiwan

  • Department of Electro-Optical Engineering, Kun Shan University, Tainan, Taiwan

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